New generation of microthermometers and
multifunctional sensors for use in cryogenic engineering and low-temperature physics
INTAS Project # 2000-476
INTAS project WORKSHOP September 27-29, 2004
Project duration: July 2001 – September 2004
Supported by the EU in the framework of the INTAS Program. This Project joins together seven groups of
researchers from West- and East-European research centres, universities and institutes
with complementary activities in the field of semiconductor technology, microsystems and
sensors, low-temperature physics, cryogenic thermometry and metrology.
The main objective of the Project is the development of a new
generation of microthermometers and multifunctional sensors for cryogenic applications
based on new semiconductor film materials and modern microelectronic and micromachining
The realisation of the Project will result in the development,
investigation and production of a number of types of novel microsensors to measure
temperature over the 0.02 to 600 K range in the presence of magnetic fields and under
ionising radiation. The Project also includes the development of multifunctional sensors
for concurrent measurements of a number of parameters, such as temperature, magnetic field
Novel physical principles, functional materials and technologies will
also be developed for multisensor devices, and prototypes of multifunctional sensors will
be produced. The microthermometers and multifunctional sensors proposed in the Project
will become the pioneer devices in this field.
The Project involves:- (i) the development of new semiconductor film
materials and novel technologies (based on modern microelectronic and micromachining
techniques) for manufacturing of various microsensors; (ii) comprehensive investigations
of sensor characteristics in the 0.02 to 600 K temperature range, in magnetic fields and
under ionising radiation (neutrons and gamma-rays); (iii) theoretical and experimental
studies of magnetic field and radiation effects on the sensing materials; (iv)
optimisation of the sensor design; (v) device testing; (vi) organisation of production
and marketing of sensors developed.
The Project will provide a number of types of new cryogenic
semiconductor-film resistance microthermometers that cover the temperature range from 0.02
to 500 K, as well as diode temperature microsensors that are intended for use in the 1 to
600 K temperature range. The results will be of immediate use for the relevant
instrumentation industries. Of special importance will be an increase in the number of
these devices available for science and industry, that are at present very limited in both
choice and commercial availability, and virtually are not produced in the EU countries.
The major subject of this Project is to develop a new and promising
topic “Cryogenic microthermometers and multisensors based on semiconductor-film
microelectronic and micromachining technologies” that is a novel topic for the European
Project participants and contact persons:
CNR - Istituto di Metrologia “G. Colonnetti” (IMGC), Torino, Italy - Coordinator
Institute of Cryogenics (IC), University of Southampton, Southampton, UK
Institute of Semiconductor
Physics (ISP) of the National Academy of Sciences of Ukraine, Kiev, Ukraine
Dr. Eugene Venger
Research & Production Company MicroSensor Ltd (MicroSensor), Kiev, Ukraine
Scientific & Research Institute “Orion” (Orion), Kiev, Ukraine
Dr. Nikolai Boltovets
Institute of Materials Science
Problems (IMSP) of the National Academy of Sciences of Ukraine, Chernovtsy Department,
National Science Centre “Kharkov Institute of Physics &Technology” (NSC KIPT),
Dr. Pavel Sorokin
The main relevant papers of the researchers involved in the INTAS-Project (1990-2001):
The main scientific papers that have emerged from the Project:
F. Pavese, "Fields of applications: cryogenics", Chapter 9 in
”Sensors” (a comprehensive book series in eight volumes), Vol. 4 "Thermal Sensors", Eds. H. Scholz and T. Ricolfi, VCH, Weinheim (1990).
- F. Pavese, P.P.M. Steur, D. Ferri, D. Giraudi, Wang Li, L.I. Zarubin, I.Y. Nemish,
Magnetoresistance of Kiev cryogenic doped germanium thermometers up to 6 T,
30 (1990) 437-441.
- L.I. Zarubin, I.Y. Nemish, A. Szmyrka-Grzebyk, Germanium resistance
thermometers with low magnetoresistance, Cryogenics, 30 (1990)
- T. Haruyama, P.C. McDonald, Evaluation of simple constant current sources for silicon
diode thermometers, Meas. Sci. Technol., 3 (1992) 713-717.
- V. Mitin, Microsensors of temperature, magnetic field, and strain, Cryogenics, 34
- K. Pateman, P. McDonald, M.A. Brumell, Magnetic field effects on temperature sensing
diodes, Institute of Physics - Condensed Matter and Materials Physics Conference,
Birmingham, December 1994.
- P.C. McDonald, Diode temperature transducers for process systems, Cryogenics, 35
- F. Pavese, V.M. Malyshev P.P.M. Steur, D. Ferri, D. Giraudi, Routine calibration of
cryogenic thermometers in the range 1.7-350 K with an accuracy up to the millikelvin
level, and measurement of fixed points in sealed cells with a fully automated and
self-contained modular apparatus, Advances in Cryogenic Engineering., 41B (1996) 1683-1690.
- D. Giraudi, P.P.M. Steur, D. Ferri, F. Pavese, The resistance-temperature
characteristics of the new Cernox-type cryogenic thermometers in the range 1.5-350
TEMPMEKO 97 (1997) 155-156.
- V.F. Mitin, Yu.A. Tkhorik, E.F. Venger, All-purpose technology of physical sensors on
the base of Ge/GaAs heterostructures, Microelectronics J., 28 (1997) 617-625.
- D.J. Gowlett, P.C. McDonald, The effect of energisation current on the calibration of
silicon diode thermometers, Proc. of the Seventh International Cryogenic Engineering
Conference ICEC 17, Bournemouth, 14th-17th July 1998.
- V.F. Mitin, Ge/GaAs heterostructures: preparation, properties, and application to
sensors, Molecular Phys. Reports., 21 (1998) 71-78.
- V.F. Mitin, E.F. Venger, N.S. Boltovets, M. Oszwaldowski, T. Berus,
film resistance thermometers, Sensors and Actuators A, 68 (1998) 303-306.
- V.F. Mitin, Miniature resistance thermometers based on Ge films on
GaAs, Advances in Cryogenic Engineering, 43 (1998) 749-756.
-   V.F. Mitin, Resistance thermometers based on the germanium films, Semiconductor
Physics, Quantum Electronics & Optoelectronics, 2 (1999) 115-123.
-   N.S. Boltovets, V.V. Basanets, V.N. Ivanov, V.A. Krivutsa, A.E. Belyaev, R.V. Konakova,
V.G. Lyapin, V.V. Milenin, E.A. Soloviev, E.F. Venger, D.I. Voitsikhovskyi, V.V.
Kholevchuk, V.F. Mitin, Microwave diodes with contact metallization systems based on
silicides, nitrides and borides of refractory metals, Semiconductor Physics, Quantum
Electronics & Optoelectronics, 3 (2000) 359-370.
- V. Mitin, J. McFarland, G. G. Ihas, V.K. Dugaev, Ge film thermometers at ultralow
temperatures in high magnetic fields, Physica B, 284-288 (2000)
- N.S. Boltovets, V.V. Kholevchuk, R.V. Konakova, V.F. Mitin, E.F. Venger,
resistance and Si-based diode temperature microsensors for cryogenic applications, Sensors
and Actuators A, 92 (2001) 191-196.
N.S.Boltovets, V.K.Dugaev, V.V.Kholevchuk, P.C.McDonald, V.F.Mitin, I.Yu.Nemish, F.Pavese, I.Peroni, P.V.Sorokin, E.A.Soloviev, E.F.Venger, New generation of resistance thermometers based on Ge films on GaAs substrates.,
Themperature: Its Measurement and Control in Science and Industry, 7, edited by Dean C. Ripple, AIP, Chicago, (2003), pp.399-404.
V.K.Dugaev, G.G.Ihas, C.McKenney, V.V.Kholevchuk, V.F.Mitin, I.Yu.Nemish, E.A.Soloviev, M.Vieira. Characterization and modelling of Ge film thermometers for low temperature measurements. Proceedings of 1st IEEE International Conference on Sensors (IEEE Sensors 2002), pp. 1275-1280, Orlando, USA, June 12-14, 2002.
V.F.Mitin, V.V.Kholevchuk, V.K.Dugaev, M.Vieira. Low temperature properties of compensated Ge films used for cryogenic thermometers. 2002 MRS Spring Meeting, San Francisco, USA, April 1 - 5, 2002. In: Defect and Impurity Engineered Semiconductors and Devices III. Editors: S. Ashok, J. Chevallier, N.M. Johnson, B.L. Sopori, H. Okushi. Materials Research Society Proceedings, vol. 719, (2002).
V.F.Mitin, V.V.Kholevchuk, R.V.Konakova, E.F.Venger, V.A.Odarich, O.V.Rudenko, M.P.Semen'ko, M.V.Khimenko. Surface structure and electrical properties of Ge films on semi-insulating GaAs substrates. Proceedings of 23th International Conference on Microelectronics (MIEL'02), vol. 1, pp. 401-404, Nis, Yugoslavia, May 12-15, 2002.
M.Oszwaldowski, T.Berus, V.K.Dugaev. Weak localization in InSb thin films heavily doped with lead. Physical Review B, 65 (23), (2002) 235418/1-6.
V.K.Dugaev, V.L.Volkov, M.Oszwaldowski, M.Vieira. Energy relaxation at inelastic scattering of electrons from localized states. Technical Physics Letters, 28 (21), (2002) 51-56.
Gary Ihas, Chris McKenney, Vadim Mitin, and Vitali Dugaev. Design of "Zero Magneto-resistance" Ge Thin Film Thermometers. Bull. American Physical Society, 48, (2003) p. 1277.
V.F.Mitin, P.C.McDonald, F.Pavese, N.S.Boltovets, V.V.Kholevchuk, I.Yu.Nemish, V.V.Basanets, V.K.Dugaev, P.V.Sorokin, E.F.Venger, E.V.Mitin. New temperature and magnetic field sensors for cryogenic applications developed under a European Project. ICEC 20, 11-14 May 2004, Beijing, China, pp.971-974. (Zhang, Liang (EDT) /Lin, Liangzhen (EDT) /Chen, Guobang (EDT) /Publisher: Elsevier Science Ltd Published 2006/03, ISBN:0080445594 (Hard cover book).
V.K.Dugaev, J.Berakdar, J.Barnas, W.Dobrowolski, V.F.Mitin, M.Vieira. Magnetoresistance due to domain walls in semiconducting magnetic nanostructures. Materials Science and Engineering C 25, pp.705-709 (2005).
V.K.Dugaev, J.Barnaś, J.Berakdar, V.I.Ivanov, W.Dobrowolski, V.F.Mitin. Magnetoresistance of a semiconducting magnetic wire with domain wall. Physical Review B, Vol. 71 No. 2, 024430 (2005).
V.F. Mitin, N.S. Boltovets, V.V. Basanets, V.V. Kholevchuk, I.Yu. Nemish, F. Pavese, P.C. McDonald. Ge/GaAs thermometers and multisensor for temperature and magnetic field measurements. Proceedings of 9th International Symposium on Temperature and Thermal Measurements in Industry and Science, “TEMPMEKO 2004”, Cavtat-Dubrovnik, Croatia, June 21-25, 2004, pp. 643-648.
V.F. Mitin, N.S. Boltovets, V.V. Basanets, V.V. Kholevchuk, I.Yu. Nemish, E.V.Mitin, P.C. McDonald, F. Pavese. New thermometers and multisensors for cryogenic temperature and magnetic field measurements. Advances in Cryogenic Engineering, Vol. 51, pp.1243-1250 (2006).
V.F. Mitin, N.S. Boltovets, V.V. Basanets, V.V. Kholevchuk, I.Yu. Nemish, E.V. Mitin, F. Pavese, P.C. McDonald, New accurate multisensor for cryogenic temperature and magnetic field measurements. Proceedings of 21st International Cryogenic Engineering Conference (ICEC 20), Prague, Czech Republic, July 17-21, 2006.
P.C. McDonald, E. Jaramillo, B. Baudouy, Thermal design of the CFRP support struts for the spatial framework of the Herschel Space Observatory. Cryogenics, 46, 298–304 (2006).
V.F. Mitin, P.C. McDonald, F. Pavese, N.S. Boltovets, V.V. Kholevchuk, I.Yu. Nemish, V.V. Basanets, V.K. Dugaev, P.V. Sorokin, R.V. Konakova, E.F. Venger, E.V. Mitin, Ge-on-GaAs film resistance thermometers for cryogenic applications. Cryogenics, Vol. 47, pp. 474-482 (2007).